This course introduces fabrication and design fundamentals for MicroElectroMechanical Systems (MEMS): on-chip sensor and actuator systems having micron-scale dimensions. Basic principles covered include microstructure fabrication, mechanics of silicon and thin-film materials, electrostatic force, capacitive motion detection, fluidic damping, piezoelectricity, piezoresistivity, thermal micromechanics and microfluidics. Applications covered include pressure sensors, micromirror displays, accelerometers, gas microsensors and microfluidic systems. Hands-on laboratory assignments introduce fabrication and testing of microstructures. Grades are based on exams, lab and homework assignments. The prerequisites for undergraduates are one of the following: 18-322, 18-321 or 24-351.
